Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH PURATREM

CAS Number 352535-01-4
Molecular Weight 410.90
Formula C1 2 H3 2 HfN4
MDL number MFCD03427130
Molecular Formula C1 2 H3 2 HfN4 Molecular Formula C1 2 H3 2 HfN4
Chemical Formula Hf[N(CH3 )(CH2 CH3 )]4 Chemical Formula Hf[N(CH3 )(CH2 CH3 )]4
Color and Form colorless to yellow liq. Color and Form colorless to yellow liq.
Note Available prepacked in ALD cylinder- see 98-4048. Volatile precursor for the ALD, CVD and MOCVD deposition of hafnium oxide. Note Available prepacked in ALD cylinder- see 98-4048. Volatile precursor for the ALD, CVD and MOCVD deposition of hafnium oxide.
Stability moisture sensitive Stability moisture sensitive
Safety Hazardous - an additional Dangerous Goods freight charge may apply Safety Hazardous - an additional Dangerous Goods freight charge may apply
Physical Characteristics boiling point 79°C/0.1mm, density 1.324
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